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Number 4 - Vent Valve - Situated inside the front cell below and to the still left of the Bell Container Bottom 3. Switch the button reverse clockwise (to your left) to open; you should end up being capable to sense suction at the opposing end of the of the control device opening 4. Verify the Cryogenics Heat Indicator (CTI) situated on the correct side of the chambér, it should examine 12-14oD; if the temperature increases, check out the HI VAC control device to create sure it is certainly completely closed. Take note: If the HIVAC control device is totally shut and the temperatures scans outside of the 12-14oM range; get in touch with support workers in the clear room instantly for help 5.

1. Airco Temescal lot Electron Beam E-gun CV-8 & CV14 power Supply Parts This is a large lot of Airco Temescal CV-14 & CV-8 Parts that are all in decent shape as they have been held in stock for our own use.
2. Temescal FC-1800 Evaporator system. With CTI-8 cryopump, auto cryo regeneration, rod fed electron beam gun, 10 kW power supply, X-Y beam sweep, GP 307 vacuum gauge, GE programmable controller. Temescal BJD 2400 Manual Load Batch System Temescal VES 2550 Vacuum System Performance The Temescal BJD 2400 vacuum system pumps down from atmosphere into the 10-7 range in ten minutes, to 2×10-7 torr.

CV-6SLX TECHNICAL MANUAL Revision F, July 2008 Temescal, a part of Edwards Vacuum, Inc. 4569-C Las Positas Road, Livermore, CA 94551. Temescal, a part of Edwards.

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Continue to switch the device until a minor whistling audio is noticed, this shows that the chamber stress is escalating. Once the pressure begins to boost, stop switching the knob and wait around approximately 2-3 moments †6. Once the pressure has reached atmosphere level, completely open up the in-take valve (counterclockwise) as seen in Amount 4 4. Open up the chamber (Body 5) by relocating the lever (pointed out by the arrow) ahead, or aside from you, to raise the Bell Jar. Amount 6 - Inficon - film thickness keep track of ‰ 7. Examine for the “XTAL” sign lighting, if the indication is blinking, the crystal is poor. Notice: If the crystal is bad, it will require to be changed; contact support workers in the clear room for assistance.

If the “XTAL” indication is not really blinking, the crystal is great and prepared for make use of. Place your wafer ón the substrate installation platter and secure it by fastening the metallic clips as demonstrated in Amount 7. Notice: You need to make use of the 5/16th inch socket wrench tó fasten the cIips. Figure 18 - Inficon - film thickness monitor † 1. Push the “Program” switch (pointed out by the reddish colored arrow) † 2.

Following, push the “Thickness 2” button and get into a value for “Thickness 2” followed by the “Enter” key (highlighted in glowing blue) † 3. Push the “Thickness 1” button and enter a worth (usually the same as “Thickness 2”) and press “Get into” † 4. Next, press the “Time” key and enter a worth for “Time” (typicaIly ‘9999') and press “Enter” † 5. Press the “Density” switch and get into a value for “Density” (this depends on the steel you are usually lodging and should become obtained from the Mass densities and Z Values table) ánd press “Enter” † 6. Push the “Z Ratio” switch and get into a worth for “Z Ratio” (once again, this depends on the metallic you are depositing, get from the Bulk Densities and Z . Values table) ánd press “Enter” † 7. Lastly, press the “Tooling” switch and enter a worth for “Tooling” (typically ‘100'), press “Enter” ‰ 24.

Open the water control device (situated behind Indy) by turning the control device to your left until the handle can be parallel with the water collection as demonstrated in Body 19. Figure 22 - Curriculum vitae-8 AircoTemescal † 1. Turn the Essential to the “On” placement; the “P.M. Credit cards Keylock” and “HV OFF” lamps should arrive on (highlighted in blue) Notice: You can focus out on thé Inficon by pressing the “No” key on the lnficon. On the Curriculum vitae-8, turn the “Emission Control” button (highlighted in green), situated on the right part, to zero † 3. Push the “H.Sixth is v. In” button (highlighted in orange) and hold for 1 second † 4.

Press the “Rifle #1 Fil. On” key (highlighted in yellow) † 5.

Switch the “Emission Manage” knob (in green) to desired environment which is reliant on the metal you are usually adding ‰ 28. Look through the home window in the bell jar, a light purple glow in the crucibIe in the chambér shows the metal is heating up as observed in Shape 23. Figure 25 - Shutter Handle (Open) ‰ 1. The shutter is definitely controlled by a silicone tube located below the bell container. Convert the tube Clockwise (to the right) to open up the shutter as seen in Number 25 and keep it open up ‰ 32. With the shutter open and out of the way, permit the evaporating steel to deposit onto the substraté to the desired thickness. On the Inficon (Amount 24, web page 18), for most alloys you should keep your deposition rate at around 1-1.5 Angstroms/sec, you will obtain a even more even coating if you run it gradually; to end up being secure keep it beIow 2 Angstroms/sec ‰ 34.

Continue to keep the shutter open up until you achieve you desired thickness. Once you are prepared to end depositing metallic, perform the right after steps: Determine 26 - Resume-8 Airco Temescal ‰ 1. Press the “H.Sixth is v. Off” key on the CV-8 Airco Temescal (Shape 26, outlined in blue) and close the “Shutter” (observe Figure 25 - Shutter Handle on web page 18) at the exact same time (to near the shutter, switch the tubing countertop counterclockwise or to your left) o Turning off the Large Voltage stops the electron ray from heating the metallic and shutting the shutter physically stops any additional deposition. Press the “Weapon #1 Fil. Off” button on the Airco Temescal (Number 26, outlined in yellowish) ‰ 3. Come back the Emission Control knob to No (Physique 26, outlined in green) ‰ 4.

Turn the essential on the Aircó Temescal to thé away placement (this hinders the higher voltage) ‰ 5. Change the “Emis” Ion Gauge away on the Varian (notice Shape 16 - Varian SenTorr on page 15) ‰ 6. Remove energy from the Inficon as noticed below in Body 27 Figure 27 - Inficon ‰ 36. Enable the program to amazing for 15-20 a few minutes. After the program offers cooled, turn the “Main Powér” off on thé “rolling” strength offer by flipping the lever straight down as demonstrated in Body 28. Physique 28 - Primary Power - Going Power Offer (Off) ‰ 39. Change off drinking water device (situated behind Indy) by switching the valve to your right until the deal with is verticle with respect with the drinking water line (Physique 29) Amount 29 - Water Device (Off) ‰ 40.

Switch off strength at main outlet breaker Body 30 - Outlet Breaker (Off) ‰ 41. Close the HiVac valve (clockwise), it can be important to create certain it is certainly completely closed so apply approximately 50 pounds of power to the handle; you wish it to end up being cuddle but not really too tight. Shape 31 - Hi-Vac Valve ‰ 42. Remove the front panel again by tugging downward on the rings and lifting up on the cell (Body 32). Figure 32 - Front Board Latches (runs by arrows) ‰ 43.

Open the “Vent out Valve” by switching the button reverse clockwise (or to your still left) until you listen to a minor “hissing” audio, then switch it two or three even more times as seen in Figure 33. Wait around for the chamber to vent out, the hissing will prevent when it has attained Atmospheric pressure. Figure 33 - Vent Device (Open) ‰ 44. Push the handle ahead to open the bell jar (Figure 34). When the bell jar has completely opened up you can rotate it to the still left out of your method.

Figure 34 - Opening the Bell Container ‰ 45. Remove the metallic platter from the chamber by raising it from the three metallic prongs on which it is usually mounted (as observed in Number 35), and set it on the table to the still left of the device. Amount 35 - Metallic Platter ‰ 46. Examine the cup slides that protect the windows of the bell container, if the film negatives are simply no longer transparent, they will require to be replaced. Close the Bell Jar by tugging the handle backwards (pointed out by the reddish arrow in Number 36) Figure 36 - Bell Container in the Closed Place ‰ 48. Next, shut the Vent Valve by switching it clockwise (right), as seen in Number 37 Figure 37 - Vent Device (Close) ‰ 49.

Open up the Roughing Device by raising the reddish colored toggle protection and metallic lever up (Shape 38). Physique 38 - Pneumatic Roughing Control device (Open up) ‰ 50. Pump motor the system down to 2E-2 torr (Physique 39 shown in azure). Number 39 - Varian SenTorr ‰ 51.

Close Roughing Valve (Amount 40). Kousoku card battle card hero. Physique 40 - Pneumatic Roughing Device (Close up) ‰ 52. End of procedure.